Model

SEC-4400

SEC-4500

SEC-4550

SEC-4600

Standard Flow Range(N2 Eq.)

5 sccm ~ 8 slm

10 ~ 30 slm

31 ~ 50 slm

51 ~ 100 slm

Wetted Materials

M (metal) -Type: SUS-316L-R (viton) type

Valve Piezo Valve

(Normal Close or Normal Open)

Flow Control Range

2 ~ 100% F.S.

Accuracy

± 1% F.S.

Response

<1.0sec. (500ms typical)

Linearity

± 0.5% F.S.

Repeatability

± 0.2% F.S.

Operating Pressure

14 ~ 42 psi

21 ~ 42 psi

Leak Integrity

M-Type: 5x10 -10 Pa·m ³/s(He) or less

Operating Temperature

5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C)

Flow Rate Setting Signal

0.1 ~ 5VDC

Flow Rate Output Signal

0 ~ 5VDC

Power Supply

± 15VDC ± 5% 60mA

Standard Fitting

1/4” VCR, 1/4” Swagelok

3/8”VCR,3/8”Swagelok